These profilers are currently the most widely used, and their measurement Salubrinal supplier accuracy is equal to 0.5 μrad RMS (3 nm RMS). However, the measurement range is limited to ±5 mrad (the radius

of curvature is ±500 m for a length of 100 mm), and they can measure only sectional two-dimensional shapes in a straight line. There is no way to measure an aspheric surface with an accuracy within the order of a nanometer. The purpose of this study is to develop a direct, non-contact profiler to measure aspheric surfaces with a radius of curvature from flat to 10 mm, with a figure error of less than 1 nm PV, a slope error of less than 0.1 μrad, and a measurement time of less than 5 min/sample. Principle of measurement Figure 1 illustrates the measurement principle of the profiler. This measuring method is based on the straightness

of laser light buy 5-Fluoracil and the accuracy of a rotational goniometer [7, 8]. Detector quadrant photodiode (QPD) is established at the rotation center of two sets of goniometers at the optical system side; moreover, a light source is set at the position where it is equal to a rotation center optically, and a measured surface is assembled so that the distance becomes R y from the original point of the measured surface to the rotation center of two sets of goniometers at the sample system side. The normal vectors of each point on the mirror surface are determined by making the incident Epothilone B (EPO906, Patupilone) light beam on the surface and the reflected beam at that point coincide, through BV-6 cell line the use of a straight stage (Δy) and two sets of goniometers (θ, φ, α, β), each consisting of a pair of goniometers. This method measures the normal vectors (n x , n z ) and their coordinates

(x, z) on the specimen surface using the straightness of a laser beam. The surface shape is obtained from the normal vectors and their coordinates using a reconstruction algorithm. The machine consists of an optical system with two goniometers and one linear motion stage and a specimen system with two goniometers [9, 10]. Figure 1 Principle of profile measurement by normal vector tracing. Each normal vector on the specimen surface is equivalent to the light vector when the incident and reflected light paths coincide. To achieve this, the reflected beam is controlled to return to the center of the QPD using the motion of each stage. Then, each normal vector is determined from the angle of rotation of the goniometers. Moreover, during measurement, the optical path length (L) is kept constant by a y-stage (Δy), and the coordinates of each normal vector are determined. Figure 2 shows the overall coordinate system in this measurement method. Measurement point coordinate P and normal vector N of the measured surface are values from coordinate system S. Therefore, firstly, measurement point coordinate P and the normal vector N are demanded in coordinate system F.